3-Bit Digital-to-Analog Converter with Mechanical Amplifier for Binary Encoded Large Displacements

We present the design, fabrication, and characterization of a MEMS-based 3-bit Digital-to-Analog Converter (DAC) that allows generation large displacements. The DAC consists electrostatic bending-plate actuators are connected to mechanical amplifier (mechAMP), enabling amplification output displacement. Based on parallel binary-encoded voltage signal, displacement system can be controlled in an arbitrary order. Considering we simplified analytic model, which was confirmed by FE simulation results. fabricated systems showed total stroke approx. 149.5 ± 0.3 µm linear stepwise 3 bit correlated 23 ? eight defined positions at control 60 V. minimum switching time between two input binary states is 0.1 ms. experimental derive influence mechAMP functionality DAC. Furthermore, resonant behavior speed analyzed. By changing electrode activation sequence, 27 achieved upgrading into 3-tri-state (33) system.